Scanning excimer irradiation equipment for R&D 


Excimer irradiation system for mass production

Scanning excimer irradiation equipment with an irradiation width of 400 mm. (Max. material size: 400mm x 800mm)

Type of model ASM400 Excimer
Emission wavelength 172nm
Material to be treated W400mmD800mm or less, Thickness 40mm or less
Irradiation distance adjustment With laboratory jack for adjustment (variable irradiation distance from 0 to 40 mm)
Outside dimensions Main unit:(W)760mm(D)2000mm(H)630mm (Excluding protrusions)
Approx. weight Approx. 122.7kg (Main unit: 100kg、Irradiation unit: 10.3kg Lamp power supply: 12.4kg)
Material of main unit SUS304 / A5052P / SPCC
Irradiation unit
Manufacturer of lamps Made by Hamamatsu Photonics K.K.
Model FLAT EXCIMER EX-400 L11751-01
Illumination intensity 65mW/cm2
Size of irradiated surface 400mm38mm
Excimer effective irradiation distance Within 5mm recommended
Cooling method forced air cooling
Conveying part
Table materials A5052P (With a slit for positional alignment)
Light-shielding cover PVC (UV-cut yellow)
Treatment speed 0.1mm/sec~120mm/sec
Range of motion 1000mm
Touch Panel 7-inch color Touch Panel
Number of recipes 20 recipes (Treatment speed and Irradiation time can be set.)
Monitor function Display function for current speed, current position, and remaining time
Ozone exhaust system Built-in ozone catalyst (fan-forced exhaust)
Input-Output conditions Single-phase 200V 50/60Hz 1000VA

※ This equipment is tailored to the user's individual specifications and can be made to order. Please feel free to contact us.