Scanning excimer irradiation equipment for R&D
（400mm）
Scanning excimer irradiation equipment with an irradiation width of 400 mm. (Max. material size: 400mm x 800mm)
| Type of model | ASM400 Excimer |
|---|---|
| Emission wavelength | 172nm |
| Material to be treated | W400mmD800mm or less, Thickness 40mm or less |
| Irradiation distance adjustment | With laboratory jack for adjustment (variable irradiation distance from 0 to 40 mm) |
| Outside dimensions | Main unit：（Ｗ）760mm（D）2000mm（Ｈ）630mm (Excluding protrusions) |
| Approx. weight | Approx. 122.7kg （Main unit: 100kg、Irradiation unit: 10.3kg Lamp power supply: 12.4kg） |
| Material of main unit | SUS304 / A5052P / SPCC |
| Irradiation unit | |
| Manufacturer of lamps | Made by Hamamatsu Photonics K.K. |
| Model | FLAT EXCIMER EX-400 L11751-01 |
| Illumination intensity | 65mW/cm2 |
| Size of irradiated surface | 400mm38mm Excimer effective irradiation distance Within 5mm recommended |
| Cooling method | forced air cooling |
| Conveying part | |
| Table materials | A5052P (With a slit for positional alignment) |
| Light-shielding cover | PVC (UV-cut yellow) |
| Treatment speed | 0.1mm/sec～120mm/sec |
| Range of motion | 1000mm |
| Others | |
| Touch Panel | 7-inch color Touch Panel |
| Number of recipes | 20 recipes (Treatment speed and Irradiation time can be set.) |
| Monitor function | Display function for current speed, current position, and remaining time |
| Ozone exhaust system | Built-in ozone catalyst (fan-forced exhaust) |
| Input-Output conditions | Single-phase 200V 50/60Hz 1000VA |
※ This equipment is tailored to the user's individual specifications and can be made to order. Please feel free to contact us.
