About Excimer Irradiation equipment

For added safety, the ASM86 Excimer has a light-shielding cover over the light source and an interlock that immediately turns off the light if the entrance is opened.

The ASM86 Excimer basically does not require N₂ (nitrogen) purging.

Excimer lamps can be turned on instantaneously. Unlike low-pressure mercury lamps, no special warm-up operation is required.

Keep the distance between the excimer lamp light source and the object to be treated close. The recommended distance is within 5 mm. The greater the distance, the more the excimer light is absorbed by oxygen and the less effective it becomes. For this reason, the excimer lamp is suitable for treating workpieces that are not uneven, such as films and flat plates.

The lamp surface used by the ASM86 Excimer can reach a maximum temperature of about 200°C. For heat-sensitive samples, the irradiation time should not be too long.

Never add fluorocarbon resin. Fluoropolymer may decompose and adversely affect the lamp.

Yes, it is possible. However, it is necessary to ensure that the film does not flap because of the suction used for ozone exhaust.

The moving irradiation mode (scan mode) is an operation mode that passes directly under the excimer lamp's issuing surface (width 86 mm, depth 40 mm).

The stop irradiation mode (stop mode) is an operation mode in which irradiation is performed after stopping directly below the excimer lamp's emission surface (width: 86 mm, depth: 40 mm).

The ASM86 Excimer can irradiate up to 40 mm thick.

The most common method is to measure the contact angle using a contact angle meter. For simple confirmation, a dyne pen can be used to determine the contact angle. In some cases, XPS is used to determine the contact angle at the atomic level.

Depending on the material, it will return to its pre-irradiation state over the elapsed time after treatment.

Ozone is generated from atmospheric oxygen directly under the excimer lamp, but the ASM86 Excimer comes standard with an ozone decomposition unit, so no special measures are required.

Rental loaner equipment is available. Please feel free to contact us.

The ASM86 Excimer is not subject to notification of the installation of radio frequency application equipment in accordance with the Radio Law.

It is especially used for wet pre-cleaning of TFT LCD glass substrates and film deposition processes.

Measure the distance in the photo below and add 0.6mm for the lamp setback.