Scanning excimer irradiation equipment for R&D
It integrates an excimer irradiation unit with a main wavelength of 172 nm, Stage for scanning, and Ozone decomposition unit, and allows for simple and safe experiments of excimer surface modification using only a 100 V power supply.
Features
- Stage for scanning enables treatment of a larger area than conventional equipment.
- Integrated ozone decomposition unit eliminates the need for exhaust equipment, etc.
Equipment specification
Scanning excimer irradiation equipment for R&D |
|
| Type of model | ASM86 Excimer |
|---|---|
| Emission wavelength | 172nm |
| Material to be treated | W86mmD120mm or less, Thickness 40mm or less |
| Irradiation distance adjustment | With laboratory jack for adjustment (variable irradiation distance from 0 to 40 mm) |
| Outside dimensions | Main unit：（Ｗ）432mm（D）510mm（Ｈ）520.5mm (Excluding protrusions) |
| Approx. weight | Approx. 25 kg (Main unit: 20 kg, Irradiation unit: 4.8 kg) |
| Material of main unit | SUS304 / A5052P / SPCC |
| Irradiation unit | |
| Manufacturer of lamps | Made by Hamamatsu Photonics K.K. |
| Model | FLAT EXCIMER EX-86U L13129 |
| Illumination intensity | 50mW/cm2 |
| Size of irradiated surface | 86mm40mm Excimer effective irradiation distance 5mm or less recommended |
| Cooling method | Forced air cooling |
| Conveying part | |
| Table materials | A5052P (With a slit for positional alignment) |
| Light-shielding cover | PVC (UV-cut yellow) |
| Treatment speed | 0.1mm/sec～40mm/sec |
| Range of motion | 240mm |
| Others | |
| Touch Panel | 4-inch monochrome Touch Panel |
| Number of recipes | 20 recipes (Treatment speed and Irradiation time can be set.) |
| Monitor function | Display function for current speed, current position, and remaining time |
| Ozone exhaust system | Built-in ozone catalyst (fan-forced exhaust) |
| Input-Output conditions | AC100V 50/60Hz 400VA |
Click here for frequently asked questions about excimer irradiation equipment.
