Ozone concentration measurement data

UV ozone surface cleaning cleans and modifies the surface of materials through the following three effects

1. Cleaning modification effect due to the energy of light with a wavelength of 184.9 nm
2. Cleaning modification effect due to the energy of light with a wavelength of 253.7 nm
3. Cleaning modification effect by generated ozone O3

Normally, the exhaust airflow is adjusted to maximize UV illumination, but it is also possible to check the effects of ozone and other factors.

We measured the change in ozone by adjusting the exhaust air volume in each standard equipment.

Ozone concentration data in chamber　ASM1101N

Equipment used

Equipment name	Type	Manufacturer
UV cleaning and surface modification equipment	ASM1101N　（S/N 212245）	Made by  ASUMI GIKEN, Limited
Ozone decomposition equipment	AOZ013（S/N 4）	Made by  ASUMI GIKEN, Limited
Ozone Monitor	EG-3000D　（S/N 1251182）	Made by EBARA JITSUGYO CO., LTD.
UV illuminance meter	UV-M03A　（S/N K303926）	Made by ORC MANUFACTURING CO.,LTD.
Anemometer	WS-06　（S/N 001/T.018335）	Made by CUSTOM corporation
Data Logger	GL240　（S/N C10731393）	Made by Graphtec Corporation

Measurement conditions

Ozone concentration measurement point: The tip of the intake tube is placed in the center of the duct as much as possible from the duct measurement flange on the rear of the ASM1101N.

UV irradiance (254nm) measurement point: 30mm away from the lamp, center of the stage.

Exhaust airflow 0.45m³/min

Elapsed time [s]	60	120	180	240	300	360	420	480	540	600
Ozone concentration [ppm]	48.7	45.6	44.3	45.7	45.7	46.3	45.7	45.2	46.0	44.2
UV illuminance [mW/cm2]	22.5	21.8	19.8	17.5	16.6	15.2	15.0	15.0	14.8	13.9

Exhaust airflow 1m³/min

Elapsed time [s]	60	120	180	240	300	360	420	480	540	600
Ozone concentration [ppm]	18.4	18.6	19.4	18.1	18.5	19.2	19.0	18.6	18.7	19.0
UV illuminance [mW/cm2]	24.2	24.8	23.5	24.3	24.4	24.2	24.4	23.4	24.0	24.0

The UV illuminance itself is lower due to insufficient cooling of the UV lamps because the UV illuminance was suppressed compared to an exhaust air volume of 1 m3 , but the ozone concentration is more than twice as high.

Ozone concentration data in chamber　ASM2001N

Equipment used

Equipment name	Type	Manufacturer
UV cleaning and surface modification equipment	ASM2001N（S/N 212734）	Made by ASUMI GIKEN, Limited
Ozone decomposition equipment	AOZ014（S/N 8）	Made by ASUMI GIKEN, Limited
Ozone Monitor	EG-3000D　（S/N 1251182）	Made by EBARA JITSUGYO CO., LTD.
UV illuminance meter	UV-M03A　（S/N K303926）	Made by ORC MANUFACTURING CO.,LTD.
Anemometer	WS-06　（S/N 001/T.018335）	Made by CUSTOM corporation
Data Logger	GL240　（S/N C10731393）	Made by Graphtec Corporation

Measurement conditions

Ozone concentration measurement point: The tip of the intake tube is placed in the center of the duct as much as possible from the duct measurement flange on the rear of the ASM1101N.

UV irradiance (254nm) measurement point: 30mm away from the lamp, center of the stage.

Exhaust airflow　0.2m³/min（Fully closed damper）

Elapsed time [s]	60	120	180	240	300	360	420	480	540	600
Ozone concentration [ppm]	90.5	104.1	110.1	122.5	117.1	126.6	130.9	128.0	130.2	128.9
UV illuminance [mW/cm2]	12.2	8.2	6.3	5.1	4.5	4.3	4.7	4.6	4.7	4.7

Exhaust airflow 　1.1m³/min（Damper 1/2 open）

Elapsed time [s]	60	120	180	240	300	360	420	480	540	600
Ozone concentration [ppm]	27.9	27.9	27.3	27.4	26.9	27.3	28.8	28.5	27.7	27.8
UV illuminance [mW/cm2]	33.2	33.0	32.7	32.8	32.3	32.5	32.7	32.7	32.6	32.7

Exhaust airflow 　11.5m³/min（Damper fully opened）

Elapsed time [s]	60	120	180	240	300	360	420	480	540	600
Ozone concentration [ppm]	23.1	23.1	22.6	22.8	22.6	22.3	23.1	22.3	22.1	23.0
UV illuminance [mW/cm2]	30.7	32.5	32.4	33.1	33.4	33.6	33.4	33.6	33.6	33.7

Ozone concentration data in chamber　ASM2503N

Equipment used

Equipment name	Type	Manufacturer
UV cleaning and surface modification equipment	ASM2503N（S/N 212565）	Made by ASUMI GIKEN, Limited
Ozone decomposition equipment	AOZ093（S/N 201）	Made by ASUMI GIKEN, Limited
Ozone Monitor	EG-3000D　（S/N 1251182）	Made by EBARA JITSUGYO CO., LTD.
UV illuminance meter	UV-M03A　（S/N K303926）	Made by ORC MANUFACTURING CO.,LTD.
Anemometer	WS-06　（S/N 001/T.018335）	Made by CUSTOM corporation
Data Logger	GL240　（S/N C10731393）	Made by Graphtec Corporation

Measurement conditions

Ozone concentration measurement point: The tip of the intake tube is placed in the center of the duct as much as possible from the duct measurement flange on the rear of the ASM1101N.

UV irradiance (254nm) measurement point: 30mm away from the lamp, center of the stage.

Exhaust airflow　0.5m³/min　(Fully closed damper)

Elapsed time [s]	60	120	180	240	300	360	420	480	540	600
Ozone concentration [ppm]	132.3	152.9	151.7	131.3	155.0	137.5	136.9	137.7	137.2	158.9
UV illuminance [mW/cm2]	16.9	17.3	18.0	18.2	17.5	16.4	15.8	15.0	14.2	13.4

Exhaust airflow　4.3m³/min（Damper 1/2 open）

Elapsed time [s]	60	120	180	240	300	360	420	480	540	600
Ozone concentration [ppm]	32.7	32.9	32.4	32.8	32.5	31.8	32.7	33.0	32.3	32.2
UV illuminance [mW/cm2]	28.0	28.3	28.2	27.9	28.5	28.3	28.4	28.2	28.6	28.9

Exhaust airflow　5.5m³/min（Damper fully opened）

Elapsed time [s]	60	120	180	240	300	360	420	480	540	600
Ozone concentration [ppm]	26.8	28.1	27.4	27.5	27.7	27.7	27.9	28.1	27.3	27.2
UV illuminance [mW/cm2]	29.0	29.0	28.9	28.8	29.1	29.0	28.3	28.8	29.1	29.3