UV cleaning surface modification data -Metals, etc-

• ITO Substrates
• SiC wafer
• SUS347

• Inconel 600
• Titanium
• Copper

• Neodymium magnet
• Aluminum
• Soda-lime glass

ITO Substrates（ Indium Tin Oxide）

Measurement data after 2 sec. of liquid drop（ITO Substrates）

Measurement point	1	2	3	4	5	6	7	8	9	Average	Standard deviation
Before cleaning	82.87	83.95	89.22	84.31	84.15	88.92	89.41	86.47	84.10	85.93	2.61
After cleaning	15.92	18.76	20.23	18.21	18.32	18.43	17.41	19.28	17.95	18.28	1.20

Irradiation distance and Irradiation time transition data

Irradiation time [sec]	0	30	60	90	120	150	180	240	300
Irradiation distance 10mm	87.13	64.38	23.64	19.79	18.27	16.73	16.27	16.53	14.28
Irradiation distance 30mm	87.13	63.33	51.00	16.57	15.84	20.27	17.00	14.80	20.98
Irradiation distance 50mm	87.13	72.36	61.09	27.96	29.51	30.00	19.91	17.78	15.11

SiC wafer

Measurement data after 2 sec. of liquid drop（C-side）

Measurement point	1	2	3	4	5	Average	Standard deviation
Before cleaning	65.13	64.81	62.35	67.38	63.63	64.66	1.87
After cleaning	4.70	4.61	4.97	5.44	4.95	4.93	0.32

Measurement data after 2 sec. of liquid drop（Si-side）

Measurement point	1	2	3	4	5	Average	Standard deviation
Before cleaning	33.72	36.74	35.82	37.33	36.18	35.96	1.38
After cleaning	4.50	4.58	4.40	4.53	5.37	4.68	0.39

SUS347

UV cleaning equipment	：ASM1101N
UV irradiation conditions	：Irradiation distance：10mm
	：Irradiation time：300 seconds
Contact Angle Meter	：B100
Conditions	：Liquid drop volume：1μL 、Measurement data after 2 sec. of liquid drop

Inconel 600

UV cleaning equipment	：ASM1101N
UV irradiation conditions	：Irradiation distance：10mm
	：Irradiation time：300 seconds
Contact Angle Meter	：B100
Conditions	：Liquid drop volume：1μL 、Measurement data after 2 sec. of liquid drop

Titanium（99.5%）

UV cleaning equipment	：ASM1101N
UV irradiation conditions	：Irradiation distance：10mm
	：Irradiation time：300 seconds
Contact Angle Meter	：B100
Conditions	：Liquid drop volume：1μL 、Measurement data after 2 sec. of liquid drop

Copper

UV cleaning equipment	：ASM1101N
UV irradiation conditions	：Irradiation distance：10mm
	：Irradiation time：300秒
Contact Angle Meter	：B100
Conditions	：Liquid drop volume：1μL 、Measurement data after 2 sec. of liquid drop

Neodymium magnet

Time [sec]	0	30	60	90	120	300	480	600
Contact angle（°）	98.78	85.08	78.34	75.09	68.35	42.99	42.06	37.35

Aluminum　A5052 Surface white alumite treatment

Time [sec]	0	30	60	90	120	300	480
Contact angle（°）	76.20	66.70	53.40	56.37	43.58	24.34	17.44

Soda-lime glass

Time [sec]	0	30	60	90	120	180	300	480
Contact angle（°）	43.42	39.65	45.01	42.04	23.17	22.38	15.72	4.17